ISO/TS 25138:2019

Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry

Publication date: Aug 6, 2019

General information

Current stage: 60.60 Effective date: Aug 6, 2019

Originator: ISO

Owner: ISO/TC 201/SC 8

Type: Technical Specification

ICS: 71.040.40

Languages: English

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Scope

This document describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Life cycle

PREVIOUSLY

Revises
ISO/TS 25138:2010

NOW

PUBLISHED
ISO/TS 25138:2019
60.60 Standard published
Aug 6, 2019

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