ISO/TS 22933:2022

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

Publication date: Apr 1, 2022

General information

Current stage: 60.60 Effective date: Apr 1, 2022

Originator: ISO

Owner: ISO/TC 201/SC 6

Type: Technical Specification

ICS: 71.040.40

Languages: English

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Status: Published

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Scope

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

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PUBLISHED
ISO/TS 22933:2022
60.60 Standard published
Apr 1, 2022

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