ISO 17973:2016

Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis

Publication date: Sep 5, 2016

General information

Current stage: 90.92 Effective date: Jan 27, 2023

Originator: ISO

Owner: ISO/TC 201/SC 7

Type: International Standard

ICS: 71.040.40

Languages: English

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Status: Published

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Scope

ISO 17973:2016 specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

Life cycle

PREVIOUSLY

Revises
ISO 17973:2002

NOW

PUBLISHED
ISO 17973:2016
90.92 Standard to be revised
Jan 27, 2023

REVISED BY

IN_DEVELOPMENT
ISO/CD 17973

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