ISO 11952:2014

Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems

95.99 Withdrawal of Standard May 21, 2019

General information

Current stage: 95.99 Effective date: May 21, 2019

Originator: ISO

Owner: ISO/TC 201/SC 9

Type: International Standard

ICS: 71.040.40

Scope

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

Life cycle

NOW

WITHDRAWN
ISO 11952:2014
95.99 Withdrawal of Standard
May 21, 2019

REVISED BY

PUBLISHED
ISO 11952:2019

Preview

Only informative sections of projects are publicly available. To view the full content, you will need to members of the committee. If you are a member, please log in to your account by clicking on the "Log in" button.