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ISO 11505:2012

Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

Dec 12, 2012

General information

90.20     Jan 15, 2023

ISO

ISO/TC 201/SC 8

International Standard

71.040.40  

English  

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Scope

ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.
It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.

Life cycle

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PUBLISHED
ISO 11505:2012
90.20 Standard under periodical review
Jan 15, 2023

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