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ISO 11039:2012

Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate

Jan 23, 2012

General information

90.93     Oct 14, 2022

ISO

ISO/TC 201/SC 9

International Standard

71.040.40  

English  

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Scope

ISO 11039:2012 defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates.
This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.

Life cycle

NOW

PUBLISHED
ISO 11039:2012
90.93 Standard confirmed
Oct 14, 2022

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