Published
This International Standard specifies a format to supplement ISO 14976 to transfer data for the creation, expansion
and revision of a surface chemical analysis spectral database. The format is applied to Auger electron
spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) spectral data.
PUBLISHED
ISO 14975:2000
90.93
Standard confirmed
May 5, 2022
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