ISO/PWI 23131-3.2

Ellipsometry — Part 3: Transparent single layer model

General information

Current stage: 00.60 Effective date: Mar 2, 2023

Originator: ISO

Owner: ISO/TC 107

Type: International Standard

Scope

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies

Life cycle

NOW

IN_DEVELOPMENT
ISO/PWI 23131-3.2
00.60 Close of review
Mar 2, 2023

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