ISO/AWI 4508

Surface chemical analysis--Scanning probe microscopy--Guidelines for the method and procedure for determining the effect of temperature on AFM nano-scale dimension measurements

General information

Current stage: 20.00 Effective date: Dec 19, 2022

Originator: ISO

Owner: ISO/TC 201/SC 9

Type: International Standard

Scope

This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).

Life cycle

NOW

IN_DEVELOPMENT
ISO/AWI 4508
20.00 New project registered in TC/SC work programme
Dec 19, 2022

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