ISO 24688:2022

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods

Publication date: Jul 22, 2022

General information

Current stage: 60.60 Effective date: Jul 22, 2022

Originator: ISO

Owner: ISO/TC 107/SC 9

Type: International Standard

ICS: 25.220.01

Languages: English

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Status: Published

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Scope

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

Life cycle

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PUBLISHED
ISO 24688:2022
60.60 Standard published
Jul 22, 2022

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