ISO 23131:2021

Ellipsometry — Principles

Publication date: Apr 22, 2021

General information

Current stage: 60.60 Effective date: Apr 22, 2021

Originator: ISO

Owner: ISO/TC 107

Type: International Standard

ICS: 17.020

Languages: English French

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Status: Published

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Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

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PUBLISHED
ISO 23131:2021
60.60 Standard published
Apr 22, 2021

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