ISO 25178-603:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

Publication date: Sep 25, 2013

General information

Current stage: 90.92 Effective date: Oct 4, 2022

Originator: ISO

Owner: ISO/TC 213

Type: International Standard

ICS: 17.040.20

Languages: English French

Buying

Status: Published

PDF - EC$436.45

Paper - EC$436.45

PDF and Paper - EC$872.90

Language

Language in which you want to receive the document.

Scope

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Life cycle

NOW

PUBLISHED
ISO 25178-603:2013
90.92 Standard to be revised
Oct 4, 2022

REVISED BY

IN_DEVELOPMENT
ISO/CD 25178-603

Preview

Only informative sections of projects are publicly available. To view the full content, you will need to members of the committee. If you are a member, please log in to your account by clicking on the "Log in" button.