ISO 14291:2012

Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers

Publication date: Jul 6, 2012

General information

Current stage: 90.60 Effective date: Mar 5, 2023

Originator: ISO

Owner: ISO/TC 112

Type: International Standard

ICS: 23.160

Languages: English

Buying

Status: Published

PDF - EC$276.92

Paper - EC$276.92

PDF and Paper - EC$553.84

Language

Language in which you want to receive the document.

Scope

ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.
ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically <300. QMSs with other ion sources, such as those of the chemical ionization, photoionization, and field ionization types, as well as the measurements of m/z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.

Life cycle

NOW

PUBLISHED
ISO 14291:2012
90.60 Close of review
Mar 5, 2023

Preview

Only informative sections of projects are publicly available. To view the full content, you will need to members of the committee. If you are a member, please log in to your account by clicking on the "Log in" button.