ISO 14644-2:2015

Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

Publication date: Dec 9, 2015

General information

Current stage: 90.60 Effective date: Mar 5, 2021

Originator: ISO

Owner: ISO/TC 209

Type: International Standard

ICS: 13.040.35

Languages: English French

Buying

Status: Published

PDF - EC$276.92

Paper - EC$276.92

PDF and Paper - EC$553.84

Language

Language in which you want to receive the document.

Scope

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

Life cycle

PREVIOUSLY

Revises
ISO 14644-2:2000

NOW

PUBLISHED
ISO 14644-2:2015
90.60 Close of review
Mar 5, 2021

Preview

Only informative sections of projects are publicly available. To view the full content, you will need to members of the committee. If you are a member, please log in to your account by clicking on the "Log in" button.