ISO 11938:2012

Microbeam analysis — Electron probe microanalysis — Methods for elemental-mapping analysis using wavelength-dispersive spectroscopy

Publication date: Mar 6, 2012

General information

Current stage: 90.93 Effective date: Dec 5, 2022

Originator: ISO

Owner: ISO/TC 202/SC 2

Type: International Standard

ICS: 71.040.50

Languages: English French

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Status: Published

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Scope

This International Standard provides procedures for electron microprobe elemental-mapping analysis using
wavelength-dispersive spectrometry. The choice between mapping with the electron beam moving digitally
across the specimen (electron beam mapping) and mapping with stage movement only (large-area mapping) is
assessed. It describes five types of data processing: the raw X‑ray intensity data method, the k‑value method,
the calibration method, the correlation method and the matrix correction method.

Life cycle

NOW

PUBLISHED
ISO 11938:2012
90.93 Standard confirmed
Dec 5, 2022

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