ISO 27895:2009

Vacuum technology — Valves — Leak test

Publication date: Nov 30, 2009

General information

Current stage: 90.93 Effective date: Jul 9, 2020

Originator: ISO

Owner: ISO/TC 112

Type: International Standard

ICS: 23.160

Languages: English

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Status: Published

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Scope

ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10-5 Pa m3/s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications.
A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.

Life cycle

NOW

PUBLISHED
ISO 27895:2009
90.93 Standard confirmed
Jul 9, 2020

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